Issued Patents 2018
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10157755 | Purge and pumping structures arranged beneath substrate plane to reduce defects | Ramesh Chandrasekharan, Adrien LaVoie | 2018-12-18 |
| 10134579 | Method for high modulus ALD SiO2 spacer | Chloe Baldasseroni | 2018-11-20 |
| 10109478 | Systems and methods for UV-based suppression of plasma instability | — | 2018-10-23 |
| 10100407 | Hardware and process for film uniformity improvement | Purushottam Kumar, Hu Kang, Adrien LaVoie, Yi Chung Chiu, Frank L. Pasquale +5 more | 2018-10-16 |
| 10074543 | High dry etch rate materials for semiconductor patterning applications | Arpan Mahorowala, Ishtak Karim, Purushottam Kumar, Adrien LaVoie | 2018-09-11 |
| 10049911 | Temporally pulsed and kinetically modulated CVD dielectrics for gapfill applications | Frank L. Pasquale | 2018-08-14 |
| 10049869 | Composite dielectric interface layers for interconnect structures | Kapu Sirish Reddy, Nagraj Shankar, Meliha Gozde Rainville, Frank L. Pasquale | 2018-08-14 |
| 10043657 | Plasma assisted atomic layer deposition metal oxide for patterning applications | Frank L. Pasquale, Adrien LaVoie | 2018-08-07 |
| 10043655 | Plasma activated conformal dielectric film deposition | Jon Henri, Dennis M. Hausmann, Pramod Subramonium, Mandyam Sriram, Vishwanathan Rangarajan +3 more | 2018-08-07 |
| 10008428 | Methods for depositing films on sensitive substrates | Hu Kang, Adrien LaVoie, Jon Henri | 2018-06-26 |
| 9997357 | Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors | Reza Arghavani, Samantha Tan, Bhadri N. Varadarajan, Adrien LaVoie, Ananda Banerji +1 more | 2018-06-12 |
| 9970108 | Systems and methods for vapor delivery in a substrate processing system | Jun Qian, Hu Kang, Purushottam Kumar, Chloe Baldasseroni, Heather Landis +11 more | 2018-05-15 |
| 9920844 | Valve manifold deadleg elimination via reentrant flow path | Karl Leeser, Saangrut Sangplung, Frank L. Pasquale, Chloe Baldasseroni, Ted Minshall +1 more | 2018-03-20 |
| 9905423 | Soft landing nanolaminates for advanced patterning | Frank L. Pasquale, Adrien LaVoie, Nader Shamma, Girish Dixit | 2018-02-27 |
| 9892917 | Plasma assisted atomic layer deposition of multi-layer films for patterning applications | Frank L. Pasquale, Adrien LaVoie | 2018-02-13 |