Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9922839 | Low roughness EUV lithography | Richard Wise | 2018-03-20 |
| 9905423 | Soft landing nanolaminates for advanced patterning | Frank L. Pasquale, Shankar Swaminathan, Adrien LaVoie, Girish Dixit | 2018-02-27 |