Issued Patents 2018
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10100407 | Hardware and process for film uniformity improvement | Purushottam Kumar, Hu Kang, Adrien LaVoie, Yi Chung Chiu, Jun Qian +5 more | 2018-10-16 |
| 10062563 | Selective atomic layer deposition with post-dose treatment | Purushottam Kumar, Adrien LaVoie, Ishtak Karim, Jun Qian, Bart J. van Schravendijk | 2018-08-28 |
| 10049869 | Composite dielectric interface layers for interconnect structures | Kapu Sirish Reddy, Nagraj Shankar, Shankar Swaminathan, Meliha Gozde Rainville | 2018-08-14 |
| 10049911 | Temporally pulsed and kinetically modulated CVD dielectrics for gapfill applications | Shankar Swaminathan | 2018-08-14 |
| 10043657 | Plasma assisted atomic layer deposition metal oxide for patterning applications | Shankar Swaminathan, Adrien LaVoie | 2018-08-07 |
| 9970108 | Systems and methods for vapor delivery in a substrate processing system | Jun Qian, Hu Kang, Purushottam Kumar, Chloe Baldasseroni, Heather Landis +11 more | 2018-05-15 |
| 9920844 | Valve manifold deadleg elimination via reentrant flow path | Karl Leeser, Saangrut Sangplung, Shankar Swaminathan, Chloe Baldasseroni, Ted Minshall +1 more | 2018-03-20 |
| 9905423 | Soft landing nanolaminates for advanced patterning | Shankar Swaminathan, Adrien LaVoie, Nader Shamma, Girish Dixit | 2018-02-27 |
| 9892917 | Plasma assisted atomic layer deposition of multi-layer films for patterning applications | Shankar Swaminathan, Adrien LaVoie | 2018-02-13 |