Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10094018 | Dynamic precursor dosing for atomic layer deposition | Purushottam Kumar, Adrien LaVoie, Jun Qian, Hu Kang, Ishtak Karim | 2018-10-09 |
| 10037884 | Selective atomic layer deposition for gapfill using sacrificial underlayer | Purushottam Kumar, Adrien LaVoie, Ishtak Karim, Jun Qian | 2018-07-31 |