Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10049921 | Method for selectively sealing ultra low-k porous dielectric layer using flowable dielectric film formed from vapor phase dielectric precursor | Nerissa Draeger, Kaihan Ashtiani, Deenesh Padhi, Derek Wong, Bart J. van Schravendijk +3 more | 2018-08-14 |
| 10037905 | UV and reducing treatment for K recovery and surface clean in semiconductor processing | Bhadri N. Varadarajan, Bart J. van Schravendijk | 2018-07-31 |
| 9865501 | Method and apparatus for remote plasma treatment for reducing metal oxides on a metal seed layer | Tighe A. Spurlin, Natalia V. Doubina, James E. Duncan, Jonathan D. Reid, David W. Porter | 2018-01-09 |