Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9997371 | Atomic layer etch methods and hardware for patterning applications | Purushottam Kumar, Adrien LaVoie | 2018-06-12 |
| 9947578 | Methods for forming low-resistance contacts through integrated process flow systems | Yu Lei, Vikash Banthia, Kai Wu, Xinyu Fu, Yi Xu +9 more | 2018-04-17 |
| 9925639 | Cleaning of chamber components with solid carbon dioxide particles | Song-Moon Suh, Yuanhong Guo, Guangchi Xuan | 2018-03-27 |