Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9925639 | Cleaning of chamber components with solid carbon dioxide particles | Yuanhong Guo, Guangchi Xuan, Pulkit Agarwal | 2018-03-27 |
SS
Song-Moon Suh
Overall (2018): #233,941 of 503,207Top 50%
1
Patents 2018