Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10096506 | Reducing temperature transition in a substrate support | Tao Zhang, Ole Waldmann | 2018-10-09 |
| 10049948 | Power switching system for ESC with array of thermal control elements | Keith Gaff, Tom Anderson, Keith Comendant, Ralph Jan-Pin Lu, Paul Gordon Robertson +1 more | 2018-08-14 |
| 9922855 | Method for reducing temperature transition in an electrostatic chuck | Tao Zhang, Ole Waldmann | 2018-03-20 |