Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10096506 | Reducing temperature transition in a substrate support | Tao Zhang, Eric A. Pape | 2018-10-09 |
| 9922855 | Method for reducing temperature transition in an electrostatic chuck | Tao Zhang, Eric A. Pape | 2018-03-20 |