Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10096494 | Substrate support with symmetrical feed structure | Douglas A. Buchberger, Jr., Xiaoping Zhou, Andrew Nguyen, Anchel Sheyner | 2018-10-09 |
| 10090187 | Multi-zone pedestal for plasma processing | Bozhi Yang, Jianhua Zhou, Dale R. DuBois, Juan Carlos Rocha-Alvarez, Ramprakash Sankarakrishnan | 2018-10-02 |
| 9948214 | High temperature electrostatic chuck with real-time heat zone regulating capability | Dmitry Lubomirsky, Jennifer Y. Sun, Sehn Thach, Michael D. Willwerth, Konstantin Makhratchev | 2018-04-17 |