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Apparatus and method for purging gaseous compounds |
Juan Carlos Rocha-Alvarez, Amit Kumar BANSAL, Ganesh Balasubramanian, Ramprakash Sankarakrishnan |
2018-12-25 |
| 10153185 |
Substrate temperature measurement in multi-zone heater |
Dale R. Du Bois, Bozhi Yang, Sanjeev Baluja, Amit Kumar BANSAL, Juan Carlos Rocha-Alvarez |
2018-12-11 |
| 10125422 |
High impedance RF filter for heater with impedance tuning device |
Jian J. Chen, Mohamad A. Ayoub, Juan Carlos Rocha-Alvarez, Zheng John Ye, Ramprakash Sankarakrishnan |
2018-11-13 |
| 10127099 |
Bad sector repair method and apparatus |
Meng Zhou, Yan Li |
2018-11-13 |
| 10128118 |
Bottom and side plasma tuning having closed loop control |
Juan Carlos Rocha-Alvarez, Amit Kumar BANSAL, Ganesh Balasubramanian, Ramprakash Sankarakrishnan, Mohamad A. Ayoub +1 more |
2018-11-13 |
| 10090187 |
Multi-zone pedestal for plasma processing |
Xing Lin, Bozhi Yang, Dale R. DuBois, Juan Carlos Rocha-Alvarez, Ramprakash Sankarakrishnan |
2018-10-02 |
| 10060032 |
PECVD process |
Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more |
2018-08-28 |
| 10030306 |
PECVD apparatus and process |
Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more |
2018-07-24 |
| 9975320 |
Diffusion bonded plasma resisted chemical vapor deposition (CVD) chamber heater |
Ren-Guan Duan, Juan Carlos Rocha-Alvarez |
2018-05-22 |
