Issued Patents 2018
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10161035 | Apparatus and method for purging gaseous compounds | Amit Kumar BANSAL, Ganesh Balasubramanian, Jianhua Zhou, Ramprakash Sankarakrishnan | 2018-12-25 |
| 10153185 | Substrate temperature measurement in multi-zone heater | Dale R. Du Bois, Bozhi Yang, Jianhua Zhou, Sanjeev Baluja, Amit Kumar BANSAL | 2018-12-11 |
| 10128118 | Bottom and side plasma tuning having closed loop control | Amit Kumar BANSAL, Ganesh Balasubramanian, Jianhua Zhou, Ramprakash Sankarakrishnan, Mohamad A. Ayoub +1 more | 2018-11-13 |
| 10125422 | High impedance RF filter for heater with impedance tuning device | Jian J. Chen, Mohamad A. Ayoub, Zheng John Ye, Ramprakash Sankarakrishnan, Jianhua Zhou | 2018-11-13 |
| 10100408 | Edge hump reduction faceplate by plasma modulation | Sungwon Ha, Kwangduk Douglas Lee, Ganesh Balasubramanian, Martin Jay Seamons, Ziqing Duan +5 more | 2018-10-16 |
| 10094486 | Method and system for supplying a cleaning gas into a process chamber | Ramprakash Sankarakrishnan, Dale R. Du Bois, Ganesh Balasubramanian, Karthik Janakiraman, Thomas Nowak +2 more | 2018-10-09 |
| 10090187 | Multi-zone pedestal for plasma processing | Xing Lin, Bozhi Yang, Jianhua Zhou, Dale R. DuBois, Ramprakash Sankarakrishnan | 2018-10-02 |
| 10083818 | Auto frequency tuned remote plasma source | Abdul Aziz Khaja, Mohamad A. Ayoub, Ramesh Bokka, Jay D. Pinson, II | 2018-09-25 |
| 10060032 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more | 2018-08-28 |
| 10032608 | Apparatus and method for tuning electrode impedance for high frequency radio frequency and terminating low frequency radio frequency to ground | Jian J. Chen, Mohamad A. Ayoub | 2018-07-24 |
| 10030306 | PECVD apparatus and process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more | 2018-07-24 |
| 10023954 | Slit valve apparatus, systems, and methods | John Mazzocco, Dale R. Du Bois | 2018-07-17 |
| 9975320 | Diffusion bonded plasma resisted chemical vapor deposition (CVD) chamber heater | Ren-Guan Duan, Jianhua Zhou | 2018-05-22 |
| 9922819 | Wafer rotation in a semiconductor chamber | Ganesh Balasubramanian, Ramprakash Sankarakrishnan, Robert W. Kim, Dale R. Du Bois, Kirby H. Floyd +2 more | 2018-03-20 |
| 9889567 | Wafer swapper | Dale R. Du Bois, Karthik Janakiraman, Hari Ponnekanti, Sanjeev Baluja, Prajeeth Wilton | 2018-02-13 |