Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10094486 | Method and system for supplying a cleaning gas into a process chamber | Ramprakash Sankarakrishnan, Dale R. Du Bois, Ganesh Balasubramanian, Juan Carlos Rocha-Alvarez, Thomas Nowak +2 more | 2018-10-09 |
| 10056279 | Semiconductor process equipment | Hari Ponnekanti, Juan Carlos Rocha, Mukund Srinivasan | 2018-08-21 |
| 9889567 | Wafer swapper | Dale R. Du Bois, Juan Carlos Rocha-Alvarez, Hari Ponnekanti, Sanjeev Baluja, Prajeeth Wilton | 2018-02-13 |