Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153185 | Substrate temperature measurement in multi-zone heater | Bozhi Yang, Jianhua Zhou, Sanjeev Baluja, Amit Kumar BANSAL, Juan Carlos Rocha-Alvarez | 2018-12-11 |
| 10094486 | Method and system for supplying a cleaning gas into a process chamber | Ramprakash Sankarakrishnan, Ganesh Balasubramanian, Karthik Janakiraman, Juan Carlos Rocha-Alvarez, Thomas Nowak +2 more | 2018-10-09 |
| 10023954 | Slit valve apparatus, systems, and methods | John Mazzocco, Juan Carlos Rocha-Alvarez | 2018-07-17 |
| 9922819 | Wafer rotation in a semiconductor chamber | Ganesh Balasubramanian, Juan Carlos Rocha-Alvarez, Ramprakash Sankarakrishnan, Robert W. Kim, Kirby H. Floyd +2 more | 2018-03-20 |
| 9889567 | Wafer swapper | Juan Carlos Rocha-Alvarez, Karthik Janakiraman, Hari Ponnekanti, Sanjeev Baluja, Prajeeth Wilton | 2018-02-13 |