Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153185 | Substrate temperature measurement in multi-zone heater | Dale R. Du Bois, Jianhua Zhou, Sanjeev Baluja, Amit Kumar BANSAL, Juan Carlos Rocha-Alvarez | 2018-12-11 |
| 10128705 | Electric motor heating/cooling system | Tomas Vianna Martins, Scott Michael Graves, Ethan Bagget Swint, Eric Bellemare, Lev Fedoseyev +3 more | 2018-11-13 |
| 10090187 | Multi-zone pedestal for plasma processing | Xing Lin, Jianhua Zhou, Dale R. DuBois, Juan Carlos Rocha-Alvarez, Ramprakash Sankarakrishnan | 2018-10-02 |