Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10113231 | Process kit including flow isolator ring | Kalyanjit Ghosh, Kien N. Chuc, Mayur Govind Kulkarni, Sanjeev Baluja, Yanjie Wang +1 more | 2018-10-30 |
| 10090187 | Multi-zone pedestal for plasma processing | Xing Lin, Bozhi Yang, Jianhua Zhou, Juan Carlos Rocha-Alvarez, Ramprakash Sankarakrishnan | 2018-10-02 |