Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10113231 | Process kit including flow isolator ring | Dale R. DuBois, Kalyanjit Ghosh, Mayur Govind Kulkarni, Sanjeev Baluja, Yanjie Wang +1 more | 2018-10-30 |
| 10017855 | Process kit for a high throughput processing chamber | Kalyanjit Ghosh, Mayur Govind Kulkarni, Sanjeev Baluja, Sungjin Kim, Yanjie Wang | 2018-07-10 |
| 9978564 | Chemical control features in wafer process equipment | Qiwei Liang, Xinglong Chen, Dmitry Lubomirsky, Soonam Park, Jang-Gyoo Yang +4 more | 2018-05-22 |