Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10062587 | Pedestal with multi-zone temperature control and multiple purge capabilities | Jang-Gyoo Yang, Alexander Tam, Elisha Tam | 2018-08-28 |
| 10056233 | RPS assisted RF plasma source for semiconductor processing | Saurabh Garg, Jang-Gyoo Yang | 2018-08-21 |
| 10032606 | Semiconductor processing with DC assisted RF power for improved control | Jang-Gyoo Yang, Soonam Park, Jonghoon Baek, Saurabh Garg, Shankar Venkataraman | 2018-07-24 |
| 9991134 | Processing systems and methods for halide scavenging | Anchuan Wang, Zihui Li, Hiroshi Hamana, Zhijun Chen, Ching-Mei Hsu +5 more | 2018-06-05 |
| 9978564 | Chemical control features in wafer process equipment | Qiwei Liang, Kien N. Chuc, Dmitry Lubomirsky, Soonam Park, Jang-Gyoo Yang +4 more | 2018-05-22 |
| 9892888 | Particle generation suppresor by DC bias modulation | Jonghoon Baek, Soonam Park, Dmitry Lubomirsky | 2018-02-13 |
| 9865474 | Etching method using plasma, and method of fabricating semiconductor device including the etching method | Gon-jun Kim, Vladimir Volynets, Sang Jin An, Hee-jeon Yang, Sangheon Lee +2 more | 2018-01-09 |