Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9966274 | Method of generating plasma in remote plasma source and method of fabricating semiconductor device using the same method | Sam Kim, Sangheon Lee | 2018-05-08 |
| 9865474 | Etching method using plasma, and method of fabricating semiconductor device including the etching method | Vladimir Volynets, Sang Jin An, Hee-jeon Yang, Sangheon Lee, Sung-keun Cho +2 more | 2018-01-09 |