Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9865474 | Etching method using plasma, and method of fabricating semiconductor device including the etching method | Gon-jun Kim, Vladimir Volynets, Hee-jeon Yang, Sangheon Lee, Sung-keun Cho +2 more | 2018-01-09 |