Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10032606 | Semiconductor processing with DC assisted RF power for improved control | Jang-Gyoo Yang, Xinglong Chen, Soonam Park, Saurabh Garg, Shankar Venkataraman | 2018-07-24 |
| 9892888 | Particle generation suppresor by DC bias modulation | Soonam Park, Xinglong Chen, Dmitry Lubomirsky | 2018-02-13 |
| 9888554 | System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector | Mathew Abraham, David Robert Evans, Jack Michael Gazza | 2018-02-06 |