Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10125422 | High impedance RF filter for heater with impedance tuning device | Jian J. Chen, Mohamad A. Ayoub, Juan Carlos Rocha-Alvarez, Ramprakash Sankarakrishnan, Jianhua Zhou | 2018-11-13 |
| 10128088 | Graded in-situ charge trapping layers to enable electrostatic chucking and excellent particle performance for boron-doped carbon films | Prashant Kumar Kulshreshtha, Ziqing Duan, Abdul Aziz Khaja, Amit Kumar BANSAL | 2018-11-13 |
| 10100408 | Edge hump reduction faceplate by plasma modulation | Sungwon Ha, Kwangduk Douglas Lee, Ganesh Balasubramanian, Juan Carlos Rocha-Alvarez, Martin Jay Seamons +5 more | 2018-10-16 |