Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10128088 | Graded in-situ charge trapping layers to enable electrostatic chucking and excellent particle performance for boron-doped carbon films | Ziqing Duan, Abdul Aziz Khaja, Zheng John Ye, Amit Kumar BANSAL | 2018-11-13 |