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High impedance RF filter for heater with impedance tuning device |
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| 10128118 |
Bottom and side plasma tuning having closed loop control |
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PECVD process |
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PECVD apparatus and process |
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2018-07-24 |
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Apparatus and method for tuning electrode impedance for high frequency radio frequency and terminating low frequency radio frequency to ground |
Juan Carlos Rocha-Alvarez, Mohamad A. Ayoub |
2018-07-24 |
| 9865431 |
Apparatus and method for tuning a plasma profile using a tuning electrode in a processing chamber |
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2018-01-09 |
