Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10060032 | PECVD process | Nagarajan Rajagopalan, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang, Juan Carlos Rocha-Alvarez +17 more | 2018-08-28 |
| 10030306 | PECVD apparatus and process | Nagarajan Rajagopalan, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang, Juan Carlos Rocha-Alvarez +17 more | 2018-07-24 |
| 10002745 | Plasma treatment process for in-situ chamber cleaning efficiency enhancement in plasma processing chamber | Lin Zhang, Xuesong Lu, Andrew V. LE, Jang Seok OH | 2018-06-19 |
| 9972487 | Dielectric-metal stack for 3D flash memory application | Nagarajan Rajagopalan, Sung Hyun Hong, Bok Hoen Kim, Mukund Srinivasan | 2018-05-15 |