Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10002745 | Plasma treatment process for in-situ chamber cleaning efficiency enhancement in plasma processing chamber | Lin Zhang, Andrew V. LE, Jang Seok OH, Xinhai Han | 2018-06-19 |
| 9881787 | Deposition methods for uniform and conformal hybrid titanium oxide films | Chien-Teh Kao, Benjamin Schmiege, Juno Yu-Ting Huang, Yu Lei, Yung-Hsin Lee +7 more | 2018-01-30 |