Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10002745 | Plasma treatment process for in-situ chamber cleaning efficiency enhancement in plasma processing chamber | Lin Zhang, Xuesong Lu, Jang Seok OH, Xinhai Han | 2018-06-19 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10002745 | Plasma treatment process for in-situ chamber cleaning efficiency enhancement in plasma processing chamber | Lin Zhang, Xuesong Lu, Jang Seok OH, Xinhai Han | 2018-06-19 |