Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10100408 | Edge hump reduction faceplate by plasma modulation | Kwangduk Douglas Lee, Ganesh Balasubramanian, Juan Carlos Rocha-Alvarez, Martin Jay Seamons, Ziqing Duan +5 more | 2018-10-16 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10100408 | Edge hump reduction faceplate by plasma modulation | Kwangduk Douglas Lee, Ganesh Balasubramanian, Juan Carlos Rocha-Alvarez, Martin Jay Seamons, Ziqing Duan +5 more | 2018-10-16 |