Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10100408 | Edge hump reduction faceplate by plasma modulation | Sungwon Ha, Ganesh Balasubramanian, Juan Carlos Rocha-Alvarez, Martin Jay Seamons, Ziqing Duan +5 more | 2018-10-16 |
| 9947599 | Method for PECVD overlay improvement | Yoichi Suzuki, Michael Wenyoung Tsiang, Takashi Morii, Yuta GOTO | 2018-04-17 |