Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10096494 | Substrate support with symmetrical feed structure | Xing Lin, Douglas A. Buchberger, Jr., Xiaoping Zhou, Andrew Nguyen | 2018-10-09 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10096494 | Substrate support with symmetrical feed structure | Xing Lin, Douglas A. Buchberger, Jr., Xiaoping Zhou, Andrew Nguyen | 2018-10-09 |