Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9922860 | Apparatus and methods for wafer chucking on a susceptor for ALD | Kaushal Gangakhedkar | 2018-03-20 |
| 9892941 | Multi-zone resistive heater | Anqing Cui, Binh Tran, Alexander Tam, Jacob Smith, R. Suryanarayanan Iyer +1 more | 2018-02-13 |
| 9856561 | Auto-refill ampoule and methods of use | Kenric Choi | 2018-01-02 |