Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10121655 | Lateral plasma/radical source | Anantha K. Subramani, Abhishek Chowdhury, John C. Forster, Nattaworn Nuntaworanuch, Kallol Bera +2 more | 2018-11-06 |
| 9922860 | Apparatus and methods for wafer chucking on a susceptor for ALD | Joseph Yudovsky | 2018-03-20 |