Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10121655 | Lateral plasma/radical source | Anantha K. Subramani, Kaushal Gangakhedkar, John C. Forster, Nattaworn Nuntaworanuch, Kallol Bera +2 more | 2018-11-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10121655 | Lateral plasma/radical source | Anantha K. Subramani, Kaushal Gangakhedkar, John C. Forster, Nattaworn Nuntaworanuch, Kallol Bera +2 more | 2018-11-06 |