| 10147596 |
Methods and solutions for cleaning INGAAS (or III-V) substrates |
Chun YAN |
2018-12-04 |
| 10125415 |
Structure for relaxed SiGe buffers including method and apparatus for forming |
Zhiyuan Ye, Errol Antonio C. Sanchez, Keun-Yong Ban |
2018-11-13 |
| 10115607 |
Method and apparatus for wafer outgassing control |
Chun YAN, Hua Chung, Schubert S. Chu |
2018-10-30 |
| 10090147 |
Integrated system and method for source/drain engineering |
Chun Yan, Melitta Hon, Hua Chung, Schubert S. Chu |
2018-10-02 |
| 10043667 |
Integrated method for wafer outgassing reduction |
Chun YAN, Hua Chung, Schubert S. Chu |
2018-08-07 |
| 10043666 |
Method for inter-chamber process |
Errol Antonio C. Sanchez, Zhiyuan Ye, Keun-Yong Ban |
2018-08-07 |
| 10043870 |
Method and structure to improve film stack with sensitive and reactive layers |
Zhiyuan Ye, Errol Antonio C. Sanchez, David K. Carlson, Keun-Yong Ban |
2018-08-07 |
| 10002759 |
Method of forming structures with V shaped bottom on silicon substrate |
Chun YAN, Errol Antonio C. Sanchez |
2018-06-19 |
| 9923081 |
Selective process for source and drain formation |
Zhiyuan Ye, Flora Fong-Song CHANG, Abhishek Dube, Xuebin Li, Errol Antonio C. Sanchez +2 more |
2018-03-20 |
| 9905412 |
Method and solution for cleaning InGaAs (or III-V) substrates |
Chun YAN |
2018-02-27 |
| 9865706 |
Integrated process and structure to form III-V channel for sub-7nm CMOS devices |
Chun YAN |
2018-01-09 |
