Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10119192 | EPI base ring | Steve Aboagye, Paul Brillhart, Surajit Kumar, Anzhong Chang, Satheesh Kuppurao +1 more | 2018-11-06 |
| 10119194 | Indexed gas jet injector for substrate processing system | — | 2018-11-06 |
| 10043870 | Method and structure to improve film stack with sensitive and reactive layers | Zhiyuan Ye, Xinyu BAO, Errol Antonio C. Sanchez, Keun-Yong Ban | 2018-08-07 |
| 9857028 | Chamber pressure control apparatus for chemical vapor deposition systems | — | 2018-01-02 |