Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9890455 | Pre-heat ring designs to increase deposition uniformity and substrate throughput | Nyi O. Myo, John S. Webb, Masato Ishii, Xuebin Li, Zhiyuan Ye | 2018-02-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9890455 | Pre-heat ring designs to increase deposition uniformity and substrate throughput | Nyi O. Myo, John S. Webb, Masato Ishii, Xuebin Li, Zhiyuan Ye | 2018-02-13 |