Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10074555 | Non-contact substrate processing | Blake Koelmel | 2018-09-11 |
| 10062598 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2018-08-28 |
| 9890455 | Pre-heat ring designs to increase deposition uniformity and substrate throughput | John S. Webb, Masato Ishii, Xuebin Li, Zhiyuan Ye, Ali Zojaji | 2018-02-13 |