Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10008388 | Device conformity control by low temperature, low pressure, inductively coupled ammonia-nitrogen trifluoride plasma | Teng-Fang Kuo, Shi Wei Toh, Avgerinos V. Gelatos | 2018-06-26 |
| 9870921 | Cleaning method | Christopher S. Olsen, Peter Stone, Teng-Fang Kuo, Manoj Vellaikal | 2018-01-16 |