Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10121688 | Electrostatic chuck with external flow adjustments for improved temperature distribution | Matthew J. Busche, Vijay D. Parkhe, Senh Thach, Konstantin Makhratchev, Masanori Ono | 2018-11-06 |
| 10020218 | Substrate support assembly with deposited surface features | Vijay D. Parkhe, Teng-Fang Kuo, Zhenwen Ding | 2018-07-10 |
| 9986598 | Temperature control apparatus including groove-routed optical fiber heating, substrate temperature control systems, electronic device processing systems, and processing methods | Matthew J. Busche, Dmitry A. Dzilno, Vijay D. Parkhe, Michael R. Rice, Leon Volfovski | 2018-05-29 |
| 9875923 | Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods | Vijay D. Parkhe, Matthew J. Busche, Konstantin Makhratchev, Masanori Ono, Senh Thach | 2018-01-23 |