Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10121688 | Electrostatic chuck with external flow adjustments for improved temperature distribution | Matthew J. Busche, Vijay D. Parkhe, Wendell Glenn Boyd, Jr., Konstantin Makhratchev, Masanori Ono | 2018-11-06 |
| 9916998 | Substrate support assembly having a plasma resistant protective layer | Jennifer Y. Sun, Biraja P. Kanungo, Vahid Firouzdor | 2018-03-13 |
| 9875923 | Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods | Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Matthew J. Busche, Konstantin Makhratchev, Masanori Ono | 2018-01-23 |