Issued Patents 2018
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10119188 | Plasma erosion resistant rare-earth oxide based thin film coatings | Jennifer Y. Sun, Vahid Firouzdor, Tom K. Cho | 2018-11-06 |
| 10020170 | Chemistry compatible coating material for advanced device on-wafer particle performance | Jennifer Y. Sun, Dmitry Lubomirsky | 2018-07-10 |
| 9976211 | Plasma erosion resistant thin film coating for high temperature application | Vahid Firouzdor, Jennifer Y. Sun, Martin Jeff Salinas, Jared Ahmad Lee | 2018-05-22 |
| 9970095 | Ion assisted deposition top coat of rare-earth oxide | Jennifer Y. Sun, Vahid Firouzdor | 2018-05-15 |
| 9916998 | Substrate support assembly having a plasma resistant protective layer | Jennifer Y. Sun, Senh Thach, Vahid Firouzdor | 2018-03-13 |
| 9890086 | Rare-earth oxide based monolithic chamber material | Jennifer Y. Sun | 2018-02-13 |
| 9884787 | Rare-earth oxide based monolithic chamber material | Jennifer Y. Sun | 2018-02-06 |
| 9869013 | Ion assisted deposition top coat of rare-earth oxide | Jennifer Y. Sun, Vahid Firouzdor | 2018-01-16 |
| 9869012 | Ion assisted deposition for rare-earth oxide based coatings | Jennifer Y. Sun, Vahid Firouzdor, Ying Zhang | 2018-01-16 |
| 9865434 | Rare-earth oxide based erosion resistant coatings for semiconductor application | Jennifer Y. Sun, Tom K. Cho | 2018-01-09 |