Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10121671 | Methods of depositing metal films using metal oxyhalide precursors | Xinyu Fu, David Knapp, David Thompson, Jeffrey W. Anthis | 2018-11-06 |
| 10109534 | Multi-threshold voltage (Vt) workfunction metal by selective atomic layer deposition (ALD) | Adam Brand, Naomi Yoshida, Seshadri Ganguli, David Thompson | 2018-10-23 |
| 10094023 | Methods and apparatus for chemical vapor deposition of a cobalt layer | Sang Ho Yu | 2018-10-09 |
| 9947578 | Methods for forming low-resistance contacts through integrated process flow systems | Yu Lei, Vikash Banthia, Kai Wu, Xinyu Fu, Yi Xu +9 more | 2018-04-17 |
| 9857027 | Apparatus and method for self-regulating fluid chemical delivery | Martin Jeff Salinas, Youqun Dong, David Thompson | 2018-01-02 |