Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10128150 | Process of filling the high aspect ratio trenches by co-flowing ligands during thermal CVD | Pramit Manna, Rui Cheng, Abhijit Basu Mallick | 2018-11-13 |
| 10113234 | UV assisted silylation for porous low-k film sealing | Bo Xie, Alexandros T. Demos, Vu Ngoc Tran Nguyen, He Ren, Kang Sub Yim +1 more | 2018-10-30 |
| 10002757 | Selectively lateral growth of silicon oxide thin film | Yihong Chen, Shaunak Mukherjee, Abhijit Basu Mallick | 2018-06-19 |
| 9978685 | Conformal amorphous silicon as nucleation layer for W ALD process | Yihong Chen, Srinivas Gandikota | 2018-05-22 |