Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10128150 | Process of filling the high aspect ratio trenches by co-flowing ligands during thermal CVD | Rui Cheng, Kelvin Chan, Abhijit Basu Mallick | 2018-11-13 |
| 10074534 | Ultra-conformal carbon film deposition | Swayambhu Prasad Behera, Shahid Shaikh, Mandar B. Pandit, Tersem Summan, Patrick Reilly +4 more | 2018-09-11 |
| 10017856 | Flowable gapfill using solvents | Ranga Rao Arnepalli, Darshan Thakare, Abhijit Basu Mallick, Robert Jan Visser, Prerna Goradia +1 more | 2018-07-10 |
| 10014174 | Conformal strippable carbon film for line-edge-roughness reduction for advanced patterning | Bencherki Mebarki, Li Yan Miao, Deenesh Padhi, Bok Hoen Kim, Christopher Dennis Bencher | 2018-07-03 |
| 9865459 | Plasma treatment to improve adhesion between hardmask film and silicon oxide film | Rui Cheng, Abhijit Basu Mallick | 2018-01-09 |