| 10163629 |
Low vapor pressure aerosol-assisted CVD |
Ranga Rao Arnepalli, Nilesh Chimanrao Bagul, Robert Jan Visser |
2018-12-25 |
| 10074559 |
Selective poreseal deposition prevention and residue removal using SAM |
Geetika Bajaj, Tapash Chakraborty, Robert Jan Visser, Bhaskar Kumar, Deenesh Padhi |
2018-09-11 |
| 10043684 |
Self-limiting atomic thermal etching systems and methods |
Ranga Rao Arnepalli, Robert Jan Visser, Nitin K. Ingle, Mikhail Korolik, Jayeeta Biswas +1 more |
2018-08-07 |
| 10017856 |
Flowable gapfill using solvents |
Ranga Rao Arnepalli, Darshan Thakare, Abhijit Basu Mallick, Pramit Manna, Robert Jan Visser +1 more |
2018-07-10 |
| 9991129 |
Selective etching of amorphous silicon over epitaxial silicon |
Geetika Bajaj, Robert Jan Visser |
2018-06-05 |
| 9903020 |
Generation of compact alumina passivation layers on aluminum plasma equipment components |
Sung Je Kim, Laksheswar Kalita, Yogita Pareek, Ankur Kadam, Bipin Thakur +1 more |
2018-02-27 |
