Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163629 | Low vapor pressure aerosol-assisted CVD | Ranga Rao Arnepalli, Nilesh Chimanrao Bagul, Robert Jan Visser | 2018-12-25 |
| 10074559 | Selective poreseal deposition prevention and residue removal using SAM | Geetika Bajaj, Tapash Chakraborty, Robert Jan Visser, Bhaskar Kumar, Deenesh Padhi | 2018-09-11 |
| 10043684 | Self-limiting atomic thermal etching systems and methods | Ranga Rao Arnepalli, Robert Jan Visser, Nitin K. Ingle, Mikhail Korolik, Jayeeta Biswas +1 more | 2018-08-07 |
| 10017856 | Flowable gapfill using solvents | Ranga Rao Arnepalli, Darshan Thakare, Abhijit Basu Mallick, Pramit Manna, Robert Jan Visser +1 more | 2018-07-10 |
| 9991129 | Selective etching of amorphous silicon over epitaxial silicon | Geetika Bajaj, Robert Jan Visser | 2018-06-05 |
| 9903020 | Generation of compact alumina passivation layers on aluminum plasma equipment components | Sung Je Kim, Laksheswar Kalita, Yogita Pareek, Ankur Kadam, Bipin Thakur +1 more | 2018-02-27 |