Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10128150 | Process of filling the high aspect ratio trenches by co-flowing ligands during thermal CVD | Pramit Manna, Kelvin Chan, Abhijit Basu Mallick | 2018-11-13 |
| 9991118 | Hybrid carbon hardmask for lateral hardmask recess reduction | Thomas Jongwan Kwon, Abhijit Basu Mallick, Er-Xuan Ping, Jaesoo Ahn | 2018-06-05 |
| 9865459 | Plasma treatment to improve adhesion between hardmask film and silicon oxide film | Pramit Manna, Abhijit Basu Mallick | 2018-01-09 |