Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10157787 | Method and apparatus for depositing cobalt in a feature | Jin-Hee Park, Tae Hong Ha, Sang-Hyeob Lee, Thomas Jongwan Kwon, Jaesoo Ahn +2 more | 2018-12-18 |
| 9991118 | Hybrid carbon hardmask for lateral hardmask recess reduction | Thomas Jongwan Kwon, Rui Cheng, Abhijit Basu Mallick, Jaesoo Ahn | 2018-06-05 |
| 9879341 | Method and apparatus for microwave assisted chalcogen radicals generation for 2-D materials | Kaushal K. Singh, Deepak Jadhav, Ashutosh Agarwal, Ashish Goel, Vijay Parihar +1 more | 2018-01-30 |