Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10157787 | Method and apparatus for depositing cobalt in a feature | Jin-Hee Park, Tae Hong Ha, Thomas Jongwan Kwon, Jaesoo Ahn, Xianmin Tang +2 more | 2018-12-18 |
| 9957615 | Apparatus to improve substrate temperature uniformity | Gwo-Chuan Tzu, Kazuya Daito | 2018-05-01 |
| 9926639 | Methods for forming barrier/seed layers for copper interconnect structures | Hoon Kim, Wei Ti Lee, Sang Ho Yu, Seshadri Ganguli, Hyoung-Chan Ha | 2018-03-27 |