Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9957615 | Apparatus to improve substrate temperature uniformity | Kazuya Daito, Sang-Hyeob Lee | 2018-05-01 |
| 9916994 | Substrate support with multi-piece sealing surface | Olkan Cuvalci, Xiaoxiong Yuan | 2018-03-13 |