Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10157787 | Method and apparatus for depositing cobalt in a feature | Jin-Hee Park, Tae Hong Ha, Sang-Hyeob Lee, Jaesoo Ahn, Xianmin Tang +2 more | 2018-12-18 |
| 9991118 | Hybrid carbon hardmask for lateral hardmask recess reduction | Rui Cheng, Abhijit Basu Mallick, Er-Xuan Ping, Jaesoo Ahn | 2018-06-05 |